| Mercury Short Arc Lamps |
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Used as high-efficiency light sources in all industrial
and research fields. The arc position is very accurate. |
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| Mercury
Xenon Short Arc Lamps |
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A group of deep UV point light sources with UV rays below 300 nm.
Permitting a high-energy density deep UV irradiation. |
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| Xenon Short Arc Lamps |
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A group of
high-brightness point light source having a continuous spectrum similar to that of the
sunlight. |
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| Low Pressure Mercury Vapor Lamps
(A) |
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Efficiently irradiates
mercury resonance lines 185 to 254 nm. Suitable for cleaning, ashing and hardening of
photo-resists and optical CVD. Also effective for decomposition by oxidation. |
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| Low Pressure Mercury Vapor Lamps
(B) |
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Same as above Type A, but different lamp
shapes. |
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| High Pressure Mercury Vapor Lamps |
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Having a spectrum in the wavelength from 254 to 436 nm
peaking at 365 nm. Energy: 30W/cm to 160W/cm, Arc Length: 60 mm to 1600 mm |
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| Metal Halide Lamps
(365 nm peak) |
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Irradiates the wave length from 300 to 400 nm enhancing by adding halogen
ide.
Optimal for exposing a liquid photo resist and curing and UV ink. |
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| Metal
Halide Lamps (420 nm peak) |
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The lamps irradiate strong ray in the wavelength from 400 to 450 nm. Optimal for photo-lithography. |
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| Capillary-Type Super High Pressure Mercury Vapor
Lamps |
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Instant turn on/off type lamp (linear light source).
Two types of lamps: forced air cooled and direct water cooled. |
